JPH0446858Y2 - - Google Patents

Info

Publication number
JPH0446858Y2
JPH0446858Y2 JP1985195988U JP19598885U JPH0446858Y2 JP H0446858 Y2 JPH0446858 Y2 JP H0446858Y2 JP 1985195988 U JP1985195988 U JP 1985195988U JP 19598885 U JP19598885 U JP 19598885U JP H0446858 Y2 JPH0446858 Y2 JP H0446858Y2
Authority
JP
Japan
Prior art keywords
substrate
holding
main surface
coating device
holding part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985195988U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62103478U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985195988U priority Critical patent/JPH0446858Y2/ja
Publication of JPS62103478U publication Critical patent/JPS62103478U/ja
Application granted granted Critical
Publication of JPH0446858Y2 publication Critical patent/JPH0446858Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1985195988U 1985-12-19 1985-12-19 Expired JPH0446858Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985195988U JPH0446858Y2 (en]) 1985-12-19 1985-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985195988U JPH0446858Y2 (en]) 1985-12-19 1985-12-19

Publications (2)

Publication Number Publication Date
JPS62103478U JPS62103478U (en]) 1987-07-01
JPH0446858Y2 true JPH0446858Y2 (en]) 1992-11-05

Family

ID=31154386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985195988U Expired JPH0446858Y2 (en]) 1985-12-19 1985-12-19

Country Status (1)

Country Link
JP (1) JPH0446858Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57102135U (en]) * 1980-12-12 1982-06-23
JPS59104650A (ja) * 1982-12-07 1984-06-16 Toshiba Corp レジスト膜形成装置

Also Published As

Publication number Publication date
JPS62103478U (en]) 1987-07-01

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